Optical thin-film metrology explained — from principles to practice
The physics behind optical film thickness measurement
Fundamentals
The three mainstream routes of optical thickness measurement — reflectance, ellipsometry,
Fundamentals
Hand someone a surface roughness report and the questions that trip them up are rarely the data — they are…
Fundamentals
In the family of optical metrology, chromatic confocal is the most underrated member.
Fundamentals
Every performance figure of an ellipsometer ultimately lands on two Greek letters: Ψ (Psi) and Δ (Delta).
Fundamentals
Both are non-contact optical ways of measuring films, but the ellipsometer and the reflectance-based film…
Fundamentals
When film thickness is measured from the reflectance spectrum,
Fundamentals
Many users spend years with a film thickness gauge while their understanding stops at "shine a light,
Fundamentals
In 1704, Newton pressed a convex lens against a flat glass plate and counted the rings of color forming…
Choosing the right metrology route for your films
Selection & Comparison
There are three mature routes for surface topography and roughness measurement: the contact-type stylus…
Selection & Comparison
An ellipsometer's specification table is more complex than a film thickness gauge's: spectral band,
Selection & Comparison
This article is a checklist you can carry straight into the procurement meeting.
Selection & Comparison
A common purchasing puzzle: among reflectance-based film thickness gauges,
Selection & Comparison
The capability boundary of the reflectance-based film thickness gauge is set by one physical fact: visible…
Selection & Comparison
The same reflectance-based film thickness gauge can deliver rock-solid results on a single-layer film and…
Metrology solutions across semiconductor, PV and coating industries
Industry Applications
Surface roughness measurement is an old requirement in machining — Ra1.6 and Ra0.
Industry Applications
The display industry's need for film thickness measurement follows a unique causal chain: film thickness does…
Industry Applications
Optical coating is the birthplace of reflectance-based film thickness measurement: the extrema monitoring…
Industry Applications
A mobile phone cover glass is a product built by "stacking" films: on the glass substrate grow, in sequence,
Industry Applications
The photovoltaic industry is one of the largest volume markets for reflectance-based film thickness gauges,
Industry Applications
Semiconductors are the market with the most demanding requirements and the most complete logic for film…
Industry Applications
In automotive electronics, semiconductor chips, display panels, PCBs, and precision optical components,
Industry Applications
In the compute race ignited by artificial intelligence (AI), data centers demand near-ruthless bandwidth and…
Industry Applications
Perovskite · Dedicated Modeling · Precise Film Thickness
Industry Applications
The answer: yes.
Calibration, repeatability, fitting quality and hands-on practice
Measurement Practice
The results of both reflectometers and ellipsometers are products of fitting,
Measurement Practice
The algorithms behind roughness parameters are themselves simple (Ra is just an average).
Measurement Practice
Eighty percent of data problems with reflectance-based film thickness gauges come from the sample,
Measurement Practice
The line on the vendor's spec sheet that reads "accuracy ±0.4%" or "sub-nanometer accuracy" actually answers…
Measurement Practice
Where is the credibility of every thickness number an instrument reports ultimately anchored?
Measurement Practice
Figure 1 | The core of reflectance-based film thickness measurement is extracting thin-film interference…
Measurement Practice
When evaluating a film thickness gauge, people often focus on one parameter: repeatability.
AI, multimodal, inline metrology and industry trends
Technology & Outlook
Set the clock back to 2020: the domestic localization rate of semiconductor metrology and inspection…
Technology & Outlook
Over the past decade, optical metrology equipment has shown two clear structural trends: technical routes are…
Technology & Outlook
For forty years, the hidden barrier in optical film thickness measurement has never been the optical path —…
The Acuitik Tech Classroom is a film thickness measurement knowledge base for engineers, systematically covering the principles, instrument selection, industry applications and measurement practice of optical metrology — including spectral reflectometers (reflective interference) and ellipsometers (ellipsometry). All articles are available in both English and Chinese.
See the Selection & Comparison column: below ~100 nm or when optical constants are needed, choose an ellipsometer; for high-throughput monitoring of transparent dielectric films, choose a reflectance-based film thickness gauge; for rough-surface profiling and roughness, choose white-light interferometry. The article "Optical Thickness Measurement Methods" explains how the three routes divide the work.
All Tech Classroom articles are free to read, no registration required. We keep adding content on measurement principles, instrument selection, industry applications and measurement practice. Follow Acuitik for updates.
Explore the Acuitik NS-series film thickness gauges and ES-series ellipsometers, or talk to us about your application.