Si 折射率

Si 的光学常数 (n, k) 数据,涵盖 0.03 – 2.20 μm 波长范围。

波长范围 0.031 – 2.199 μm
数据点 1852

关键波长处的光学常数

632.8 nm (He-Ne)
n = 3.8246
k = 0.0095
589.3 nm (Na-D)
n = 3.9120
k = 0.0140
532 nm
n = 4.0768
k = 0.0235
1550 nm (通讯)
n = 3.4517
k = 0.0000

n, k 色散曲线

数据表(采样)

波长 (μm) n k
0.03100.916940.01107
0.03450.894420.01560
0.03830.866280.02201
0.04260.830970.03108
0.04730.786340.04384
0.05260.729020.06174
0.05850.652400.08715
0.06510.535320.13240
0.07230.417100.24421
0.08040.274780.41880
0.08940.203520.66501
0.09940.205080.94920
0.11050.267281.21844
0.12280.408491.44068
0.13660.480771.65828
0.15180.584431.90089
0.16880.673872.15885
0.18760.842362.55547
0.20861.119872.95007
0.23191.653713.35431
0.25781.673673.95248
0.28664.218815.43051
0.31865.062883.28491
0.35435.939653.19483
0.39385.634230.21595
0.43784.715110.05597
0.48684.288490.03239
0.54114.046540.02182
0.60163.884630.01250
0.66883.768890.00723
0.74353.684390.00493
0.82663.622230.00306
0.91903.573660.00071
1.02173.535480.00002
1.13583.506080.00000
1.26273.483180.00000
1.40383.465140.00000
1.56073.450840.00000
1.73503.439450.00000
1.92893.430360.00000
2.14443.423070.00000
2.19943.421560.00000

上表为采样数据(共 1852 个数据点),点击"下载完整 CSV"获取全部数据。

数据说明

Float zone c-Si; Heterogenous data processing combining ellipsometric and spectrophotometric measurements with refractive index determined in
B. J. Frey, D. B. Leviton, T. J. Madison.
Temperature-dependent refractive index of silicon and germanium,
Proc. SPIE 6273, 62732J (2006).
Numerical procedures updated in
D. Franta, P. Franta, J. Vohánka, M. Čermák, I. Ohlídal.
Determination of thicknesses and temperatures of crystalline silicon wafers from optical measurements in the far infrared region,
J. Appl. Phys. 123, 185707 (2018).
Temperature 100 K."

参考文献

D. Franta, A. Dubroka, C. Wang, A. Giglia, J. Vohánka, P. Franta, I. Ohlídal. Temperature-dependent dispersion model of float zone crystalline silicon, Appl. Surf. Sci. 421, 405-419 (2017) (Numerical data kindly provided by Daniel Franta)

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