Al2O3 折射率

Al2O3 的光学常数 (n, k) 数据，涵盖 0.11 – 2.20 μm 波长范围。

波长范围 0.114 – 2.200 μm
数据点 258

关键波长处的光学常数

632.8 nm (He-Ne)
n = 1.6513
k = 0.0000
589.3 nm (Na-D)
n = 1.6535
k = 0.0000
532 nm
n = 1.6572
k = 0.0000
1550 nm (通讯)
n = 1.6344
k = 0.0000

n, k 色散曲线

数据表（采样）

波长 (μm) n k
0.11411.716410.83032
0.12231.861000.75337
0.13101.975510.64118
0.14042.051500.50595
0.15042.084340.36124
0.16122.072990.22146
0.17272.020050.10250
0.18511.934720.02408
0.19831.854010.00562
0.21251.807470.00278
0.22771.775010.00144
0.24401.750770.00078
0.26141.731980.00044
0.28011.717040.00025
0.30021.704950.00015
0.32161.695020.00008
0.34461.686780.00004
0.36931.679880.00001
0.39571.674050.00000
0.42401.669110.00000
0.45431.664890.00000
0.48681.661280.00000
0.52161.658160.00000
0.55891.655450.00000
0.59891.653090.00000
0.64171.651020.00000
0.68761.649180.00000
0.73681.647550.00000
0.78951.646070.00000
0.84591.644720.00000
0.90641.643470.00000
0.97131.642300.00000
1.04071.641180.00000
1.11521.640080.00000
1.19491.638990.00000
1.28041.637880.00000
1.37201.636730.00000
1.47011.635520.00000
1.57521.634230.00000
1.68791.632820.00000
1.80861.631260.00000
1.93791.629530.00000
2.07651.627600.00000
2.19961.625790.00000

上表为采样数据（共 258 个数据点），点击"下载完整 CSV"获取全部数据。

数据说明

Film Al2O3;
Deposited by e-beam evaporation on c-Si; 121.5 nm thick film with an amorphous (very fine polycrystalline) structure;
Heterogenous data processing combining ellipsometric and spectrophotometric measurements;
Room temperature.

参考文献

D. Franta, D. Nečas, I. Ohlídal, A. Giglia. Dispersion model for optical thin films applicable in wide spectral range. Proc. SPIE 9628, 96281U (2015) (Numerical data kindly provided by Daniel Franta)

相关材料（主要）

Ag Ag3AsS3 (e) Ag3AsS3 (o) AgBr AgCl AgGaS2 (e)

需要测量 Al2O3 薄膜厚度？

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