Si Refractive Index

Name: Si Refractive Index (n, k)
Creator: Acuitik
License: https://creativecommons.org/licenses/by/4.0/
Keywords: Si, refractive index, n, k, optical constants, thin film

Optical constants (n, k) of Si, covering 0.03 – 2.20 μm wavelength range.

Range 0.031 – 2.199 μm

Data Points 1852

Optical Constants at Key Wavelengths

632.8 nm (He-Ne)

n = 3.8246

k = 0.0095

589.3 nm (Na-D)

n = 3.9120

k = 0.0140

532 nm

n = 4.0768

k = 0.0235

1550 nm (Telecom)

n = 3.4517

k = 0.0000

n, k Dispersion Curves

Data Table (Sampled)

Wavelength (μm)	n	k
0.0310	0.91694	0.01107
0.0345	0.89442	0.01560
0.0383	0.86628	0.02201
0.0426	0.83097	0.03108
0.0473	0.78634	0.04384
0.0526	0.72902	0.06174
0.0585	0.65240	0.08715
0.0651	0.53532	0.13240
0.0723	0.41710	0.24421
0.0804	0.27478	0.41880
0.0894	0.20352	0.66501
0.0994	0.20508	0.94920
0.1105	0.26728	1.21844
0.1228	0.40849	1.44068
0.1366	0.48077	1.65828
0.1518	0.58443	1.90089
0.1688	0.67387	2.15885
0.1876	0.84236	2.55547
0.2086	1.11987	2.95007
0.2319	1.65371	3.35431
0.2578	1.67367	3.95248
0.2866	4.21881	5.43051
0.3186	5.06288	3.28491
0.3543	5.93965	3.19483
0.3938	5.63423	0.21595
0.4378	4.71511	0.05597
0.4868	4.28849	0.03239
0.5411	4.04654	0.02182
0.6016	3.88463	0.01250
0.6688	3.76889	0.00723
0.7435	3.68439	0.00493
0.8266	3.62223	0.00306
0.9190	3.57366	0.00071
1.0217	3.53548	0.00002
1.1358	3.50608	0.00000
1.2627	3.48318	0.00000
1.4038	3.46514	0.00000
1.5607	3.45084	0.00000
1.7350	3.43945	0.00000
1.9289	3.43036	0.00000
2.1444	3.42307	0.00000
2.1994	3.42156	0.00000

Sampled data (1852 points total). Click "Download Full CSV" for complete data.

Notes

Float zone c-Si; Heterogenous data processing combining ellipsometric and spectrophotometric measurements with refractive index determined in
B. J. Frey, D. B. Leviton, T. J. Madison.
Temperature-dependent refractive index of silicon and germanium,
Proc. SPIE 6273, 62732J (2006).
Numerical procedures updated in
D. Franta, P. Franta, J. Vohánka, M. Čermák, I. Ohlídal.
Determination of thicknesses and temperatures of crystalline silicon wafers from optical measurements in the far infrared region,
J. Appl. Phys. 123, 185707 (2018).
Temperature 100 K."

References

D. Franta, A. Dubroka, C. Wang, A. Giglia, J. Vohánka, P. Franta, I. Ohlídal. Temperature-dependent dispersion model of float zone crystalline silicon, Appl. Surf. Sci. 421, 405-419 (2017) (Numerical data kindly provided by Daniel Franta)

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