HfO2 Refractive Index

Name: HfO2 Refractive Index (n, k)
Creator: Acuitik
License: https://creativecommons.org/licenses/by/4.0/
Keywords: HfO2, refractive index, n, k, optical constants, thin film

Optical constants (n, k) of HfO2, covering 0.11 – 2.20 μm wavelength range.

Range 0.115 – 2.200 μm

Data Points 1027

Optical Constants at Key Wavelengths

632.8 nm (He-Ne)

n = 2.0877

k = 0.0000

589.3 nm (Na-D)

n = 2.0936

k = 0.0000

532 nm

n = 2.1037

k = 0.0000

1550 nm (Telecom)

n = 2.0521

k = 0.0000

n, k Dispersion Curves

Data Table (Sampled)

Wavelength (μm)	n	k
0.1148	1.82557	1.54494
0.1233	2.02411	1.42230
0.1325	2.15099	1.29582
0.1424	2.22956	1.21139
0.1531	2.32493	1.20284
0.1645	2.56701	1.21819
0.1767	2.94009	0.97397
0.1899	3.00991	0.49192
0.2041	2.82607	0.17952
0.2193	2.62164	0.04160
0.2357	2.46088	0.00709
0.2533	2.36597	0.00630
0.2722	2.30616	0.00930
0.2925	2.26349	0.00443
0.3143	2.22605	0.00173
0.3377	2.19692	0.00114
0.3629	2.17377	0.00078
0.3900	2.15494	0.00051
0.4191	2.13941	0.00028
0.4504	2.12644	0.00009
0.4840	2.11548	0.00000
0.5201	2.10629	0.00000
0.5589	2.09852	0.00000
0.6006	2.09190	0.00000
0.6454	2.08622	0.00000
0.6936	2.08134	0.00000
0.7453	2.07710	0.00000
0.8009	2.07340	0.00000
0.8607	2.07014	0.00000
0.9249	2.06726	0.00000
0.9939	2.06467	0.00000
1.0680	2.06231	0.00000
1.1477	2.06014	0.00000
1.2334	2.05810	0.00000
1.3254	2.05616	0.00000
1.4243	2.05425	0.00000
1.5305	2.05236	0.00000
1.6447	2.05042	0.00000
1.7674	2.04841	0.00000
1.8993	2.04628	0.00000
2.0410	2.04397	0.00000
2.1933	2.04145	0.00000
2.1996	2.04134	0.00000

Sampled data (1027 points total). Click "Download Full CSV" for complete data.

Notes

Film HfO₂; Deposited by e-beam evaporation on c-Si; 112.7 nm thick film with an amorphous (very fine polycrystalline) structure; Heterogenous data processing combining ellipsometric and spectrophotometric measurements; Room temperature.

References

D. Franta, D. Nečas, I. Ohlídal. Universal dispersion model for characterization of optical thin films over wide spectral range: Application to hafnia. Appl. Opt. 54, 9108–9119 (2015) (Numerical data kindly provided by Daniel Franta)

Related Materials (Main)

Ag Ag3AsS3 (e) Ag3AsS3 (o) AgBr AgCl AgGaS2 (e)

Need to measure HfO2 thin film thickness?

Acuitik film thickness measurement systems offer sub-nanometer non-contact precision.

View Products Contact Us

HfO2 Refractive Index

Optical Constants at Key Wavelengths

n, k Dispersion Curves

Data Table (Sampled)

Notes

References

Related Materials (Main)

Need to measure HfO2 thin film thickness?

Verify to Download

Download Limit Reached