AlN Refractive Index

Optical constants (n, k) of AlN, covering 0.21 – 1.69 μm wavelength range.

Range 0.211 – 1.688 μm
Data Points 697

Optical Constants at Key Wavelengths

632.8 nm (He-Ne)
n = 2.0477
k = 0.0004
589.3 nm (Na-D)
n = 2.0536
k = 0.0005
532 nm
n = 2.0641
k = 0.0007
1550 nm (Telecom)
n = 2.0180
k = 0.0001

n, k Dispersion Curves

Data Table (Sampled)

Wavelength (μm)nk
0.21142.570240.12237
0.23832.405430.04674
0.26522.303270.02169
0.29222.236060.01159
0.31912.189680.00688
0.34612.156410.00443
0.37312.131770.00304
0.40012.113020.00219
0.42712.098420.00165
0.45412.086830.00128
0.48122.077470.00103
0.50822.069810.00084
0.53522.063450.00070
0.56232.058120.00060
0.58932.053590.00052
0.61632.049720.00045
0.64332.046390.00040
0.67032.043490.00036
0.69722.040960.00032
0.72412.038740.00029
0.75112.036770.00027
0.77802.035020.00025
0.80482.033460.00023
0.83162.032060.00021
0.85842.030800.00020
0.88522.029660.00019
0.91192.028630.00017
0.93862.027690.00017
0.96522.026840.00016
0.99182.026050.00015
1.04802.024600.00014
1.10582.023340.00012
1.16392.022270.00011
1.22202.021350.00011
1.28022.020550.00010
1.33862.019860.00009
1.39712.019250.00009
1.45582.018720.00008
1.51462.018250.00008
1.57352.017830.00008
1.63252.017450.00007
1.68822.017140.00007

Sampled data (697 points total). Click "Download Full CSV" for complete data.

Notes

303 nm thick aluminum nitride (AlN) film deposited by reactive sputtering.

References

1) L. Yu. Beliaev, E. Shkondin, A. V. Lavrinenko, O. Takayama. Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths. J. Vac. Sci. Technol. A 39, 043408 (2021)
2) L. Yu. Beliaev, E. Shkondin, A. V. Lavrinenko, O. Takayama. Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths [J. Vac. Sci. Technol. A 39, 043408 (2021)]. J. Vac. Sci. Technol. A 40, 027001 (2022) (Numerical data kindly provided by Osamu Takayama)

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