Core Technology

Ellipsometry Technology

Precision polarized light analysis technology for ultra-thin film measurement solutions

Measurement Principle

Polarized light is incident on the sample surface at a specific angle, causing changes in the polarization state of reflected light. By measuring the ellipsometric parameters Ψ and Δ, film thickness, refractive index n, and extinction coefficient k can be precisely calculated.

Ellipsometry Technology

Polarized light incident on sample surface, changing polarization state of reflected light

Optical constants obtained by measuring ellipsometric parameters Ψ and Δ

Simultaneously measure film thickness, refractive index n, and extinction coefficient k

Ideal for ultra-thin films (<10nm) and complex optical materials

Ellipsometry Principle

Ellipsometry Measurement Principle

Polarized Light Generation

Linearly or elliptically polarized light incident on sample surface at specific angle

Parameter Measurement

Measure polarization state changes of reflected light, obtaining amplitude ratio Ψ and phase difference Δ

Data Analysis

Through optical model fitting, calculate film thickness, refractive index, and extinction coefficient

Product Features

Fully domestic hardware and software with independent intellectual property rights, core technology reaching international advanced level

Fully Domestic

Core components independently developed with complete IP rights

Ultra-wide Measurement Range

Measure film thickness, refractive index, n&k values from 1nm to 15μm

Non-contact Measurement

Can measure hard, soft, or surface-sensitive samples

Ultra-high Precision

Sub-nanometer thickness measurement accuracy, up to 0.05nm

Multi-layer Film Measurement

Can measure thickness and optical parameters of each layer in multi-layer composite films

Smart Algorithms

Core patented algorithms, one-click measurement of wide thickness range, greatly simplifies measurement process

PolarX Analysis Software

Self-developed PolarX analysis software with unique functions such as recipe prediction verification and special material mixing

High Stability

Static stability up to 0.005nm, stable and reliable measurement results over long-term use

Core Functions

Multi-dimensional thin film analysis functions to meet full-scenario measurement needs from R&D to production

Film Measurement

Psi/Delta optimized fitting algorithm for precise film thickness measurement

Psi/Delta Optimized Fitting Algorithm

Using advanced Psi/Delta fitting algorithm, through least squares optimization of objective function, achieving high-precision fitting of ellipsometer measurement data. This algorithm converges quickly, accurately calculating thickness, refractive index, and extinction coefficient for each layer even in complex multi-layer structures.

Multiple Material Optical Models

Built-in Cauchy, EMA, oscillator, and other optical models

Cauchy/EMA/Oscillator Models

Built-in multiple classical optical models, supporting Cauchy model, EMA effective medium approximation, oscillator model, etc., applicable to semiconductor, optical coating, 2D materials and other material systems, meeting measurement needs of different application scenarios.

Recipe Prediction Verification

One-click measurement of samples with multiple thicknesses

One-click Measurement of Multiple Thickness Samples

Innovative recipe prediction verification function, only one measurement needed to obtain prediction results for multiple thickness samples. Software automatically analyzes spectral characteristics, quickly calculating target thickness range, greatly improving R&D and production efficiency.

Application Areas

Ultra-thin Film Measurement

Precision measurement of semiconductor ultra-thin films, photoresist, and other nano-scale films

Optical Films

Thickness and optical constant measurement of optical coatings, AR films, high-reflectivity films

Flexible Materials

Film thickness inspection of OLED, thin-film solar cells, and other flexible devices

Biomedical

Analysis of biofilms, medical coatings, drug release films

Materials Research

Optical characteristics analysis of new optical materials, semiconductor materials

Surface Engineering

Analysis of hard coatings, decorative coatings, and other functional film layers

Learn More About Ellipsometry Technology

Acuitik provides precision measurement solutions based on ellipsometry technology

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